This course focuses on the design, fabrication, and application of microsystems providing a unique opportunity for interdisciplinary interactions.
MEMS technology is at the forefront of modern science and engineering of sensors, actuators, and other miniature devices. With the development of microfabrication technologies and facilities at Virginia Tech, it is natural that we become involved in this state-of-the-art research. This course will prepare students with the necessary background to allow them to participate in advanced processing laboratory and advanced MEMS design and microfabrication courses and also to pursue research in various aspects of microsystems development.
Percentage of Course
|Wafer bonding and packaging||10%|
|CAD tools for MEMS||10%|