Design, layout, fabricate, and characterize microelectronic devices. Analyze test results to verify performance to the predetermined specifications. Required oral and written reports.
This course provides the laboratory experience necessary to demonstrate all of the principles of semiconductor wafer design, fabrication, and testing. It is a critical course for preparing advanced undergraduate for working in a university research environment and/or the microelectronics industry.
Topic |
Percentage of Course |
Device design | 10% |
Layout | 20% |
Cleanroom gowning and safety | 5% |
Wafer fabrication | 45% |
Wafer cleaning | |
Wafer oxidation | |
Photoresist deposition and developing | |
Boron diffusion | |
Metallization | |
Wafer testing | 20% |
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